Fluidic based Multidirectional Flow Sensor Inspired from Artificial Cupula
The fluidic based multidirectional flow sensor inspired from artificial cupula was presented in this paper. It is consists of dome-shaped membrane, microchannel and one-side electrode with implementation of electrical double layer capacitor as a sensing element. The PDMS with ratio 20:1 was selected as a material because it is suitable to be implemented as a membrane. The micro-stamping technique for fabrication of dome-shaped membrane was proposed where the uniform thickness of membrane can be achieved. The operating frequency of the sensor using methanol was 1.5 kHz. The flow measurement was done by using water channel which flow rate 10 to 40 cm/s was applied with the resolution of 5 cm/s. The directionality tests for flow direction and angle also were carried out and it is proved that the sensor was able to detect the flow in omnidirectional directions.
- Published: 2nd Feb 2015
- Publisher: ACM